| 摘要 |
PROBLEM TO BE SOLVED: To provide a construction method of a clean room capable of preventing dew formation in the clean room under construction, and of dispensing with dew removal work. SOLUTION: In this construction method of a clean room, dry air 3a is supplied into the clean room under construction. In particular, the dry air 3a is supplied after the interior construction of the clean room to prevent dew formation on an interior finish surface of the clean room. COPYRIGHT: (C)2004,JPO
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