FILM FORMING APPARATUS, FILM FORMING METHOD, MANUFACTURING METHOD FOR ORGANIC EL DEVICE AND LIQUID DISCHARGE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a film forming apparatus for forming an electrooptical element which suppresses the occurrence of the irregularity of brightness and a luminous color, and a film forming method or the like. SOLUTION: The film forming apparatus is equipped with a cover member 100 which has a planar surface part 100a opposed to the surface of a substrate 2 and covers the surface of the substrate 2 while holding a definite interval (d) between the planar surface part 100a and the surface of the substrate 2 when a liquid material is discharged. COPYRIGHT: (C)2004,JPO