FILM FORMING APPARATUS, FILM FORMING METHOD, ELECTROOPTICAL DEVICE AND ELECTRONIC MACHINERY

摘要

PROBLEM TO BE SOLVED: To provide a film forming apparatus for forming an electrooptical element suppressed in the occurrence of the irregularity of brightness and a light emitting color and to provide a film forming method or the like. SOLUTION: The film forming apparatus is equipped with a plate member 6 having a planar surface part 6b which is opposed to the surface of the substrate 2 placed on a heating mechanism 3 and also equipped with a control member 5 for covering the surface of the substrate 2 while holding a definite interval (d) between the planar surface part 6b and the surface of the substrate 2 when the liquid material applied to the substrate 2 is dried. A plurality of through-holes 7 are provided to the plate member 6. COPYRIGHT: (C)2004,JPO