| 摘要 |
The present invention is an apparatus and method for making output signal (AC voltage) levels of MEMS capacitive sensors uniform, each including a microstructure being displaced by a certain force and a fixed electrode for detecting capacitance variation caused by gap size difference between the microstructure and the fixed electrode, the apparatus and method comprising so as to apply actuating current of a predetermined frequency to the microstructure, output a sensing signal of the fixed electrode while receiving a reference offset voltage, compare an RMS level of the sensing signal with a preset RMS level, and then adjust the reference offset voltage of the fixed electrode so that the sensing signal made equal to a target level.
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