| 摘要 |
PROBLEM TO BE SOLVED: To stably and precisely measure a surface shape of a measured object without requiring a long waiting time unnecessarily when waiting until a surface temperature of the measured object lowered by washing returns to an original temperature, in the measurement of the surface shape. SOLUTION: In this shape measuring method wherein a probe contacts with a measured face, and wherein a locus of the probe scanned under the contact condition is recorded to measure the shape, the measured object is washed(S1), the object is set on a jig (S2), and the surface temperature is measured by a radiation thermometer (S3). An operation of the probe is kept to be stopped therein until the surface temperature displayed on a display comes within a prescribed temperature range, a computer is operated after confirming that the temperature comes within the prescribed temperature range and that the temperature is brought into no fluctuation condition (Yes in S4), and the probe is thereby moved horizontally by control of the computer to measure the surface shape (S5). COPYRIGHT: (C)2004,JPO
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