| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid material discharge apparatus for preventing static electricity from being generated by an apparatus for use in liquid material filling treatment or a cleaning apparatus, a liquid material discharge method using the apparatus and electronic machinery. SOLUTION: The liquid material discharge apparatus 30 is equipped with a discharge head 34 for discharging a liquid material on a substrate, and also equipped with a liquid material filling treatment apparatus 50, which has a nozzle cap 51 for covering the discharge surface of the discharge head 34 and the suction pump 53 connected to the nozzle cap 51 through a tube 52, and an ion generating means 38 for sending an ion wind to the liquid material filling treatment apparatus 50. COPYRIGHT: (C)2004,JPO |
