| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitor suitably employed as a thin film capacitor for reducing power supply noise, e.g. a decoupling capacitor or a bypass capacitor, having a size small enough to be placed closely to an LSI (large scale integrated circuit), for example, a large capacity and a low dielectric loss in which variation in characteristics is suppressed even at a high temperature and its bias dependency is low. SOLUTION: The capacitor is used as a decoupling capacitor being connected with a power supply in order to reduce power supply noise and has a dielectric thin film 8 composed of a bismuth laminar compound where c-axis is oriented perpendicularly to the surface of a substrate for forming the thin film. The bismuth laminar compound is represented by a composition formula; (Bi<SB>2</SB>O<SB>2</SB>)<SP>2+</SP>(A<SB>m-1</SB>B<SB>m</SB>O<SB>3m+1</SB>)<SP>2-</SP>or Bi<SB>2</SB>A<SB>m-1</SB>B<SB>m</SB>O<SB>3m+3</SB>, where the symbol m is a positive number, the symbol A is at least one element being selected from among Na, K, Pb, Ba, Sr, Ca and Bi, and the symbol B is at least one element being selected from among Fe, Co, Cr, Ga, Ti, Nb, Ta, Sb, V, Mo and W. COPYRIGHT: (C)2004,JPO
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