| 摘要 |
PROBLEM TO BE SOLVED: To provide a novel method and a novel detector capable of detecting, in a real time, metals contained in a chemical used in a semiconductor manufacturing process. SOLUTION: A sample is collected from the chemical every prescribed time, and the sample is neutralized to measure absorbance using a coloring reagent. A flow injection analytical method is applicable by the method since allowing an in-line execution over the whole process, and the presence of the metals is confirmed in the real time. COPYRIGHT: (C)2004,JPO
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