LASER BEAM MACHINING METHOD AND DROPLET DISCHARGE HEAD

摘要

PROBLEM TO BE SOLVED: To enable a target shape to be machined without using a die or a photomask in the method for machining a first material of a laminated member in which the first material projects from a second material.

SOLUTION: This is a machining method for a laminated member 10 in which a metallic thin film 12 is laminated on the bottom face of a silicon substrate 11 in a manner projecting from the end 11A of the silicon substrate 11. The metallic thin film 12 is cut by irradiating a boundary between the end 11A of the silicon substrate 11 and the metallic thin film 12 with a laser beam having such a wavelength that an optical absorptance is higher for the metallic thin film 12 than for the silicon substrate 11.

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