| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method by which a highly precise hole can be formed by suitably holding the S/N ratio of a position command signal, an analog signal for scanning a galvano-mirror, in forming a round hole by oscillating a laser beam with the galvano-mirror. <P>SOLUTION: The amplitude of position command signals S<SB>1</SB>, S<SB>2</SB>which are digital signals is multiplied by a prescribed multiplying power corresponding to the amplitude. Simultaneously, the position command signals S<SB>1</SB>, S<SB>2</SB>are converted to analog signals in a D/A converter 15, divided by the same multiplying power and set back. Then, using such position command signals S<SB>1</SB>, S<SB>2</SB>, the galvano-mirrors 2, 3 are scanned through galvano-drivers 10, 11. <P>COPYRIGHT: (C)2004,JPO</p> |
