| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid material discharge apparatus for preventing trouble such that the constituent element, which is formed on a substrate by a liquid material or by the discharge of the liquid material, is charged with static electricity, a liquid material discharge method using the same and electronic machinery. SOLUTION: The liquid material discharge apparatus is equipped with a discharge head 34 for discharging the liquid material on the basis of applied voltage, a liquid material tank 35 for supplying the liquid material to the discharge head 34 and a supply tube 24, and also equipped with ion generating means 50a-50d for sending an ion wind to the discharge head 34, the liquid material tank 35 and the supply tube 24. It is preferable to provide the ion generating means 50d for sending the ion wind to a flashing region 41. COPYRIGHT: (C)2004,JPO
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