摘要 |
1,153,052. Semi-conductor devices. TEXAS INSTRUMENTS Inc. 23 June, 1966 [30 June, 1965], No. 53245/68. Divided out of 1,153,051. Heading H1K. The subject-matter of this Specification is identical with that of Specification 1,153,051, but the claims are concerned with a method of manufacturing a semi-conductor device which comprises forming first and second insulating layers on opposite faces of a semi-conductor wafer and etching the body through an aperture in the first layer to create a cavity extending through the body to the second layer. |