发明名称 Verfahren zur Herstellung von Halbleitervorrichtungen
摘要 1,153,052. Semi-conductor devices. TEXAS INSTRUMENTS Inc. 23 June, 1966 [30 June, 1965], No. 53245/68. Divided out of 1,153,051. Heading H1K. The subject-matter of this Specification is identical with that of Specification 1,153,051, but the claims are concerned with a method of manufacturing a semi-conductor device which comprises forming first and second insulating layers on opposite faces of a semi-conductor wafer and etching the body through an aperture in the first layer to create a cavity extending through the body to the second layer.
申请公布号 DE1564860(A1) 申请公布日期 1969.10.16
申请号 DE19661564860 申请日期 1966.06.25
申请人 TEXAS INSTRUMENTS INC. 发明人 RICHARDSON CUNNINGHAM,JAMES A.
分类号 H01L21/764;H01L23/482;H01L23/522 主分类号 H01L21/764
代理机构 代理人
主权项
地址