| 摘要 |
A contact between a source/drain and a gate is made by making a selected portion of the gate dielectric conductive by an implant into that selected portion of the gate dielectric. The gate material is in a layer over the entire integrated circuit. Areas where gates are to connect to source/drains are indentified and the gate dielectric at those identified locations is implanted to make it conductive. The source/drains are formed so that they extend under these areas of conductive gate dielectric so that at these locations the implanted gate dielectric shorts the gate to the source/drain. This saves area on the integrated circuit, reduces the need for interconnect layers, and avoids the problems associated with depositing and etching polysilicon on an exposed silicon substrate.
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