| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a visual examination device of components for electronic circuits for improving processing precision when performing visual examination by using color image processing to the components for the electronic circuits. <P>SOLUTION: The color image of appearance on an inspection surface of the components for the electronic circuits placed on a stage 20 is imaged by a color light receiving part 2. Then, inspection surface color information consisting of three coordinate components in a three-dimensional color space coordinate system at each position on an inspection surface is generated by an image processor 11, based on a detection output signal for indicating color image information at each position in the inspection surface output from the color light receiving part 2. Thereafter, first image processing data comprising at least one coordinate component in first inspection surface data indicating inspection surface color information and second inspection surface data subjected to coordinate conversion to a three-dimensional color space coordinate system different from the first inspection surface data, and at least either the maximum value conforming article reference data or the minimum value conforming article reference data subjected to filter processing based on the preset conforming article reference color information are subjected to subtraction by using the image processor 11. The first defect candidate region of the inspection surface is selected, thus specifying the defect region of the inspection surface, based on the first defect candidate region. <P>COPYRIGHT: (C)2004,JPO |
