| 摘要 |
PROBLEM TO BE SOLVED: To provide a new emitter replacing a needle-shaped emitter capable of stably supplying liquid gallium as an ion source of a convergent ion beam, and securing a stable ion emission. SOLUTION: The ion source of a convergent ion beam device has a capillary made of glass housing gallium as a material for ion. A tip part of the capillary is formed into a cone-shape and a fine opening from which, the gallium can be drawn out, is formed at the central part thereof. A temperature control means is provided so that the temperature of the micro capillary made of glass does not exceed 750°C. COPYRIGHT: (C)2004,JPO
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