发明名称 Copper activator solution and method for semiconductor seed layer enhancement
摘要 The present invention is directed to an activator solution and method for activating a copper-seeded surface to facilitate plating of copper onto the copper-seeded surface. The activator solution is prepared by heating a precursor solution to a temperature of at least about 95° C., and maintaining the precursor solution at said temperature for at least about 30 minutes, wherein the precursor solution comprises water, chlorine ions, copper ions, tin (II) ions, and an antioxidant compound which substantially prevents the oxidation of the tin (II) ions to tin (IV) ions.
申请公布号 US2004110374(A1) 申请公布日期 2004.06.10
申请号 US20020315477 申请日期 2002.12.10
申请人 ENTHONE, INC. 发明人 VERBUNT HAN
分类号 C23C18/16;C23C18/18;C23C18/40;H01L21/768;(IPC1-7):H01L21/302;H01L21/461 主分类号 C23C18/16
代理机构 代理人
主权项
地址