发明名称 High coupling floating gate transistor
摘要 The present invention provides methods of fabricating floating gate transistors. One method includes forming laterally spaced source and drain regions to define a channel therebetween, forming a first floating gate portion above the channel region, the first floating gate portion extending in a general horizontal direction, forming spacers over the first floating gate portion to define an exposed region on the first floating gate portion, forming a contact coupled to the first floating gate portion at the exposed region, the contact extending vertically above the first portion, forming a second floating gate portion coupled to the contact, the second floating gate portion extending in a general vertical direction, and forming a control gate adjacent to the second portion.
申请公布号 US2004110362(A1) 申请公布日期 2004.06.10
申请号 US20030727887 申请日期 2003.12.04
申请人 MICRON TECHNOLOGY, INC. 发明人 RUDECK PAUL
分类号 H01L21/28;H01L29/423;(IPC1-7):H01L21/320;H01L21/336;H01L29/788 主分类号 H01L21/28
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