EMBEDDED ELECTRODE INTEGRATED OPTICAL DEVICES AND METHODS OFFABRICATION

摘要

Waveguide devices and schemes for fabricating waveguide devices useful in applications requiring modulation, attenuation, polarization control, and switching of optical signals are provided. In accordance with one embodiment of the present invention, a method of fabricating an integrated optical devi ce is provided. The method comprises the acts of: (i) providing a support wafer (20) defining an electrode support surface; (ii) forming an electrode patter n (30) over the electrode support surface of the support wafer; (iii) forming a non-polymeric buffer layer (40) on at least a portion of the electrode patte rn and over at least a portion of the support wafer; (iv) forming a waveguide core material layer (50) over the non-polymeric silica-based buffer layer; ( v) removing portions of the core material layer (50) to define a waveguide core (52); and (vi) positioning a cladding material (60) in optical communication with the waveguide core such that the buffer layer, the cladding material, a nd the waveguide core define an optically-clad waveguide core.