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发明名称
OPTICAL METHOD MEASURING THIN FILM GROWTH
摘要
申请公布号
EP1425551(A2)
申请公布日期
2004.06.09
申请号
EP20020755368
申请日期
2002.09.13
申请人
QINETIQ LIMITED
发明人
FLYNN , COLIN JAMES
分类号
G01B11/06;(IPC1-7):G01B11/06;G01N21/41;G01N21/84;G01N21/95
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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