发明名称 Thin plate storage container
摘要 A wafer storage container (1) has a container body (2) and a lid (3). Thin plates are inserted into and picked up from the container body. The container has lid supporters (10) placed on a lid receptacle (7) of the container body, and contacting portions (16) contact with the lid supporters to support the lid. A supporting member (4) is a member attached to support the container body. The supporting member has a base plate portion (21) to support the container body, side plate portions (22,23) formed as standing from the base plate portion, and a handle (24) on each side plate gripped to lift the container body. The thin plate supporting member has contacting portions (52) to support thin plates, supporting members (53) to support the contacting portions elastically, and base supporting bar portions (54) to support the supporting portions. Tip end of each supporting portion (53) contacts with a contacting portion (62A) of each supporting stage (62), and elastically supports the contacting portions from both sides. <IMAGE>
申请公布号 EP1426999(A1) 申请公布日期 2004.06.09
申请号 EP20030027401 申请日期 2003.11.27
申请人 发明人
分类号 H01L21/68;H01L21/673;(IPC1-7):H01L21/00 主分类号 H01L21/68
代理机构 代理人
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