发明名称 |
FLAT SCANNING STAGE FOR SCANNED PROBE MICROSCOPY |
摘要 |
<p>A three-dimensional scanner incorporates a flat stage for receiving samples. The stage is supported in a scanning frame by four identical quadrant tube piezo-electric scanner elements. Each element is fixed at one end to a fixed chassis and is fastened at its opposite end through a connector to the scanner frame. The scanner elements are operated in pairs to move the stage in an X-Y plane, and are operated together to move the stage in a Z direction perpendicular to the X-Y plane.</p> |
申请公布号 |
EP0864181(B1) |
申请公布日期 |
2004.06.09 |
申请号 |
EP19960940813 |
申请日期 |
1996.11.27 |
申请人 |
LIEBERMAN, KLONY;LEWIS, AARON |
发明人 |
LIEBERMAN, KLONY;LEWIS, AARON |
分类号 |
G01B7/34;G01N37/00;G01Q10/04;G02B21/00;H01L41/09;(IPC1-7):H01L41/09 |
主分类号 |
G01B7/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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