Device for coating a substrate used e.g. in biomedical applications has an additional unit for introducing a gas without layer-forming substances into the space of the gas discharge zone facing away from the substrate

摘要

Device for coating a substrate comprises an isolator (3) arranged between a pair of electrodes (1, 2) so that a gas discharge zone (4) is formed between (1,2) to receive a substrate, and a gas feeding unit (6) for feeding a gas with layer-forming substances into (4). An additional unit (7) for introducing a gas without layer-forming substances into the space (8) of (4) facing away from the substrate. An Independent claim is also included for a process for coating a substrate.