发明名称 Verfahren zur Herstellung von npn- oder pnp-Transistoren
摘要 774,388. Semi-conductor devices. MARCONI'S WIRELESS TELEGRAPH CO., Ltd. Dec. 21, 1954 (Jan. 28, 1954], No. 2665/54. Class 37. A method of manufacturing junction transistors comprises (i) forming a semi-conductor body with a grown junction between P and N type materials; (ii) electrolytically etching said body to produce by differential etching a visible step where the junction is situated; and (iii) providing at least one emitter junction on at least one side of the grown junction at a predetermined distance therefrom. " Emitter junction " is defined as one in which a bulk alloying impurity is positioned on a single crystal semi-conductor and heat is applied to produce a fused alloy type of junction. The grown junction may be formed by crystal pulling or zone melting. In one embodiment for producing an NPN transistor (Figs. 1-4) a semiconductor PN bar (Fig. 1) is electrolytically etched to produce a step or shoulder 2 (Fig. 2) at the grown junction 1. The P type material is then partly removed and a recess or well 3 (Fig. 3) is formed by ultrasonic drilling in the remaining P type material. A pellet 5 of antimony is placed in the well 3 and heated to 550‹ C. for about 10 minutes to diffuse into or alloy with the P type material and form the required N type alloy or emitter junction. The antimony pellet 5 together with the emitter and base connection is encased in silicone resin 8 and finally the whole device (with the collector connection soldered on at 9) is impregnated with silicone resin. In the electrolytic etching process to produce the step 2 the bath may be KOH or H 2 0 2 and the current passed through the PN bar causes removal of material from the P and N portions at substantially different rates and accordingly the visible step 2 (shown exaggerated) is produced in the plane of the junction 1. The emitter and base connections 6 comprise gold wires soldered to the antimony pellet 5 and to a flat connector 7 on the ground face 4 and encircling the well 3. Chemical and electrolytic etching may be employed to clean the semi-conductor at various stages in the process. If desired a second emitter junction may be provided on the other side of the grown junction 1 to produce a double or cascade transistor. PNP transistors may be manufactured, Figs. 5 to 7 (not shown), using the same basic process as illustrated in Figs. 1 to 4 and in this case indium to form the emitter junction.
申请公布号 DE1029483(B) 申请公布日期 1958.05.08
申请号 DE1955M025818 申请日期 1955.01.18
申请人 MARCONI'S WIRELESS TELEGRAPH COMPANY LIMITED 发明人 CRESSELL IAN GEORGE ARCHIE
分类号 H01L21/00;H01L21/288;H01L29/00 主分类号 H01L21/00
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