INNER MEMBER HAVING BARRIER COATING LAYER WITH CORROSION-RESISTANCE IN PLASMA TREATMENT VESSEL

摘要

PURPOSE: An inner member of a plasma treatment vessel is provided to restrain the delamination of a sprayed coating layer by preventing a base member from being exposed to process gas or cleaning solutions using a barrier coating layer and resin. CONSTITUTION: An inner member of a plasma treatment vessel includes a base member(71) and a coating layer(72) formed by performing ceramic spraying on the base member. The coating layer includes a main layer(73) and a barrier coating layer(74) between the base member and the main layer. The ceramic of the coating layer contains at least one selected from a group consisting of B, Mg, Al, Si, Ca, Cr, Y, Zr, Ta, Ce, and Nd. The coating layer is partially sealed with resin.