发明名称 |
Chip feeder and method for feeding semiconductor chips |
摘要 |
A chip-feed device has a retaining device (110) for holding a wafer (100) in the region of a removal position (E), in which the wafer is arranged on the retaining device with its active side (120) facing downwards. A takeoff/removal device (280) removes the semiconductor chips (108) from the wafer at the removal position (E), and a transport device (200) transports the chips (100) from the takeoff position (E) into a transfer position (U). |
申请公布号 |
EP1191574(A3) |
申请公布日期 |
2004.06.09 |
申请号 |
EP20010120104 |
申请日期 |
2001.08.21 |
申请人 |
ROHWEDDER MICROTECH GMBH & CO. KG |
发明人 |
WAECKERLE, UWE |
分类号 |
B65G49/07;H01L21/00;H01L21/687 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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