发明名称 Chip feeder and method for feeding semiconductor chips
摘要 A chip-feed device has a retaining device (110) for holding a wafer (100) in the region of a removal position (E), in which the wafer is arranged on the retaining device with its active side (120) facing downwards. A takeoff/removal device (280) removes the semiconductor chips (108) from the wafer at the removal position (E), and a transport device (200) transports the chips (100) from the takeoff position (E) into a transfer position (U).
申请公布号 EP1191574(A3) 申请公布日期 2004.06.09
申请号 EP20010120104 申请日期 2001.08.21
申请人 ROHWEDDER MICROTECH GMBH & CO. KG 发明人 WAECKERLE, UWE
分类号 B65G49/07;H01L21/00;H01L21/687 主分类号 B65G49/07
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