发明名称 |
Reticle, and pattern positional accuracy measurement device and method |
摘要 |
A positional accuracy measurement pattern is formed such that the position of an edge portion required to have high positional accuracy in a device pattern and the position of the pattern center of the positional accuracy measurement pattern are arranged on the same straight line in accordance with a direction in which the high positional accuracy is necessary. On the basis of the pattern center of the positional accuracy measurement pattern and the difference between the measurement value and the design value of the pattern dimension, the positional accuracy (the difference between the measurement value and the design value) of an edge portion of the device pattern is calculated. |
申请公布号 |
US6745484(B2) |
申请公布日期 |
2004.06.08 |
申请号 |
US20020093514 |
申请日期 |
2002.03.11 |
申请人 |
FUJITSU LIMITED |
发明人 |
HORIE TSUTOMU;OHTA KAZUTOSHI |
分类号 |
G03F1/08;G03F1/14;G03F1/42;G03F1/44;G03F1/84;G03F7/20;H01L21/027;(IPC1-7):F41G1/00 |
主分类号 |
G03F1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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