发明名称
摘要 <P>PROBLEM TO BE SOLVED: To provide an ultrafine wire suctioning apparatus simplified in structure but capable of highly reliable suctioning of ultrafine wires. <P>SOLUTION: A casing member 1 is open at one end and also at the other end and houses a filter 2, and the opening 1b at one end is directly coupled with the suctioning side of a rotary fan 3. It is so constituted that an ultrafine wire 32 is suctioned into the other opening 1a of the casing member 1 when the rotary fan 3 suctions. <P>COPYRIGHT: (C)2004,JPO
申请公布号 JP3535146(B1) 申请公布日期 2004.06.07
申请号 JP20020316542 申请日期 2002.10.30
申请人 发明人
分类号 F04D29/54;H01L21/60 主分类号 F04D29/54
代理机构 代理人
主权项
地址