METHOD FOR DEFINING COMMUNICATION MESSAGE OF SEMICONDUCTOR MANUFACTURING EQUIPMENT

摘要

PURPOSE: A method for defining a communication message of a semiconductor manufacturing equipment is provided to simplify data management, prevent the modification of the message contents, and realize the compatibility with other program. CONSTITUTION: A user writing screen for writing the message is displayed(S20). The message written by the user writing screen is systematically generated by converting the message into an XML(eXtensible Markup Language) format(S22). The systematically generated message is stored as a file or a message database for storing the messages(S24,S28). The message is an SECS(Semiconductor Equipment Communication Standard) message format.