发明名称 METHOD OF FORMING WAVEGUIDE USING THE PHOTODEFINABLE COMPOSITIONS AND WAVEGUIDE FORMED THEREFROM
摘要 PURPOSE: A method for forming a waveguide and a waveguide formed therefrom are provided to improve light-transmission properties and reduce insertion loss ratio by forming the rounded cross-section at an optical waveguide, and improve optical radiation. CONSTITUTION: A photodefinable composition layer is formed on a substrate(1). The substrate including the photodefinable composition layer is partially exposed. A waveguide core structure(10) is formed by developing the exposed layer. The waveguide core structure is heated to a temperature and for a time effective to reflow the waveguide core structure such that the waveguide core structure becomes at least partially rounded in cross-section.
申请公布号 KR20040048312(A) 申请公布日期 2004.06.07
申请号 KR20030086206 申请日期 2003.12.01
申请人 ROHM AND HAAS ELECTRONIC MATERIALS, L.L.C 发明人 SHELNUT JAMES G.;MOYNIHAN MATTHEW L.;PATTERSON OMARI
分类号 G02B6/13;G02B6/00;G02B6/10;G02B6/12;G02B6/138;G02B6/30;G03F7/00;(IPC1-7):G02B6/10 主分类号 G02B6/13
代理机构 代理人
主权项
地址