发明名称 |
METHOD OF FORMING WAVEGUIDE USING THE PHOTODEFINABLE COMPOSITIONS AND WAVEGUIDE FORMED THEREFROM |
摘要 |
PURPOSE: A method for forming a waveguide and a waveguide formed therefrom are provided to improve light-transmission properties and reduce insertion loss ratio by forming the rounded cross-section at an optical waveguide, and improve optical radiation. CONSTITUTION: A photodefinable composition layer is formed on a substrate(1). The substrate including the photodefinable composition layer is partially exposed. A waveguide core structure(10) is formed by developing the exposed layer. The waveguide core structure is heated to a temperature and for a time effective to reflow the waveguide core structure such that the waveguide core structure becomes at least partially rounded in cross-section.
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申请公布号 |
KR20040048312(A) |
申请公布日期 |
2004.06.07 |
申请号 |
KR20030086206 |
申请日期 |
2003.12.01 |
申请人 |
ROHM AND HAAS ELECTRONIC MATERIALS, L.L.C |
发明人 |
SHELNUT JAMES G.;MOYNIHAN MATTHEW L.;PATTERSON OMARI |
分类号 |
G02B6/13;G02B6/00;G02B6/10;G02B6/12;G02B6/138;G02B6/30;G03F7/00;(IPC1-7):G02B6/10 |
主分类号 |
G02B6/13 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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