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发明名称
Method and apparatus for determining an etch property using an endpoint signal
摘要
申请公布号
AU2003279826(A8)
申请公布日期
2004.06.07
申请号
AU20030279826
申请日期
2003.10.31
申请人
TOKYO ELECTRON LIMITED
发明人
HONGYU YUE;HIEU A. LAM
分类号
H01J37/32;(IPC1-7):H05H1/00;H01L21/00
主分类号
H01J37/32
代理机构
代理人
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