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发明名称
摘要
申请公布号
JP3535131(B2)
申请公布日期
2004.06.07
申请号
JP20010334541
申请日期
2001.10.31
申请人
发明人
分类号
C23C2/20;(IPC1-7):C23C2/20
主分类号
C23C2/20
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