| 摘要 |
PURPOSE: A magnetic fixing apparatus for a substrate and mask is provided to be capable of uniformly distributing magnetic force over the entire surface of a substrate holder for preventing a gap from being generated between the substrate and mask. CONSTITUTION: A magnetic fixing apparatus for a substrate and mask is provided with a substrate holder(10) having a plurality of insertion holes(11), and a magnet holder(20) connected with the upper surface of the substrate holder. At this time, the magnet holder includes a plurality of insertion protrusions(21) corresponding to each insertion hole of the substrate holder. Each insertion protrusion has a connection groove(22). The magnetic fixing apparatus further includes a plurality of permanent magnets(30) connected with the connection grooves of the magnet holder.
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