METHOD AND APPARATUS FOR FORMING ALIGNMENT FILM

摘要

PURPOSE: A method and an apparatus for forming an alignment film are provided to reduce an entire process requirement time by changing a manufacturing process, thereby enhancing the yield. CONSTITUTION: An alignment film(130) is formed on the first mother substrate(10) or the second mother substrate(80). The alignment film(130) is a DLC(Diamond-Like-Carbon film) formed on the surface of a TFT(Thin Film Transistor) unit cell and a color filter unit cell. The DLC thin film(130) is used as the alignment film because it has a double bond structure. Specifically, the DLC thin film(130) is an interactive double bond structure between carbon atoms. When the carbon double atom structure is cracked by the external force and then changed into a single bond structure, the single bond carbon atoms have a radical state having polarity electrically.