SEMICONDUCTOR MANUFACTURING EQUIPMENT HAVING SEMICONDUCTOR WAFER ID CHECK SYSTEM AND SEMICONDUCTOR WAFER TREATMENT METHOD USING THE SAME

摘要

PURPOSE: Semiconductor manufacturing equipment having a semiconductor wafer ID(IDentification) check system and a semiconductor wafer treatment method using the same are provided to be capable of automatically and exactly checking semiconductor wafers without the waste of manpower and time before a semiconductor wafer treatment process. CONSTITUTION: Semiconductor manufacturing equipment is provided with an elevator(100) for moving a carrier having a plurality of semiconductor wafers up and down, and a wafer ID check part(200) for checking the bar code of the carrier and the ID of the semiconductor wafer. The semiconductor manufacturing equipment further includes a flat zone alignment part(300) for carrying out a semiconductor wafer aligning process and a number checking process for the semiconductor wafers, a carrier-wafer separation part(400) for separating the semiconductor wafers from the carrier, and a bath(500) for carrying out a wafer treatment process on the semiconductor wafer.