METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PURPOSE: A method for manufacturing a semiconductor device is provided to be capable of embodying a SAW filter using an Sl(Semi Insulating)-GaN layer of an HEMT(High Electron Mobility Transistor) for integrating the devices on a unit wafer. CONSTITUTION: An HEMT device is manufactured by depositing an SI GaN layer(12) and an AlxGa1-xN layer(13) on a semiconductor substrate(11). The first predetermined region of the AlxGa1-xN layer is etched. An FET(Field Effect Transistor) device is manufactured by forming FET electrodes(14a,14b) on the predetermined region of the AlxGa1-xN layer. The second predetermined region of the AlxGa1-xN layer is etched for exposing the SI GaN layer. Then, a SAW filter is manufactured by forming SAW filter electrodes(15) on the exposed SI-GaN layer.