CONSTANT TEMPERATURE WATER SUPPLY APPARATUS OF SEMICONDUCTOR MANUFACTURING EQUIPMENT FOR CONSERVING TEMPERATURE AND SUPPLY METHOD THEREBY

摘要

PURPOSE: A constant temperature water supply apparatus of semiconductor manufacturing equipment for conserving temperature and a supply method thereby are provided to be capable of automatically controlling the supply of constant temperature water without stopping the manufacturing process. CONSTITUTION: A constant temperature water supply apparatus is provided with a tank(116) for storing constant temperature water, a level sensor(118) installed at the sidewall of the tank for detecting the flow rate of the constant temperature water, and an automatic valve(114) installed on a line for supplying the constant temperature water to the tank. The automatic valve is capable of controlling the supply of the constant temperature water. A solenoid valve is used as the automatic valve.