MISALIGNMENT CHECK METHOD ENABLING TO ALTER EXPOSURE APPARATUS

摘要

PURPOSE: A misalignment check method enabling to alter exposure apparatus is provided to improve productivity by using KLA equipment that is altered by Q-200 equipment. CONSTITUTION: In the misalignment check method using a compatible exposure equipment, overlay marks of a zigzag type are disposed in a scribe line(102) to determine whether the overlay mark is caused by a left shot in which the left pattern of the scribe line is formed or a right shot in which the right pattern of the scribe line is formed.