发明名称 |
Equipment for detecting and correcting measurement errors, comprises measuring sensor for sample placed on measuring surface and control sensor applied to reference surface joined to measuring surface |
摘要 |
A sample (2) is placed on a measurement surface (1) and dimensions are taken by a measurement sensor (3). The measurement surface is joined (6) to a reference surface (4) where a control sensor (5) measures by optical or inductive methods any parasitic movements likely to cause measurement errors. The measurement and reference data are supplied to a computer (7) which detects and corrects any errors due to support movement
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申请公布号 |
FR2847977(A1) |
申请公布日期 |
2004.06.04 |
申请号 |
FR20020015209 |
申请日期 |
2002.12.03 |
申请人 |
DIGITAL SURF |
发明人 |
MIGNOT CHRISTOPHE |
分类号 |
G01B5/00;G01B5/008;G01B21/04;(IPC1-7):G01D21/20;G01D21/04 |
主分类号 |
G01B5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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