| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe aggregate wherein microscopically small-sized probes, providing stable contact because of small contact marks and having large current capacity, are disposed so as to correspond to a wide variety of electrodes. SOLUTION: The probe assembly 15 comprising the plurality of probes is structured such that a microscopically small-sized probe is inserted into a probe-integrated tubule 16 comprising a vertical spring part 3, a cantilever part 5 at its lower end, and a contact end part 6 at its tip end; the tubule 16 is inserted and fixed in a guide hole 11; and its upper end 2 is fixed at an upper part of the guide hole 11 while the lower end 7 is vertically free. Each probe 1 is structured so that the spring constant of the spring part 3 is smaller than that of the cantilever part 5, and the spring constant of the spring part 3 increases to exceed the spring constant of the horizontal cantilever part 5 when the spring part 3 is contracted by a load from the lower end to make contact with an inner wall of the tubule 16. COPYRIGHT: (C)2004,JPO
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