| 摘要 |
<p>A micro fluid control device comprising a substrate and, superimposed thereon, multiple resin layers, the multiple resin layers fitted with a waveguide hydraulic circuit. Further, there is provided a process for producing such a micro fluid control device, comprising the steps of (a) forming a resin layer on a substrate and subjecting the resin layer to laser machining so as to form grooves of given pattern for providing a fluid channel; (b) effecting resin coating of the whole surface of the resin layer after the machining to thereby form a second resin layer and subjecting the second resin layer to laser machining so as to form grooves and/or through-holes extending to the grooves of the resin layer having undergone the resin coating; (c) repeating the step (b); and (d) performing a final resin coating to thereby realize a waveguide hydraulic circuit.</p> |
