RELIABLE LOW-K INTERCONNECT STRUCTURE WITH HYBRID DIELECTRIC,申请号AU20030279460-传众专利搜索

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发明名称	RELIABLE LOW-K INTERCONNECT STRUCTURE WITH HYBRID DIELECTRIC
摘要
申请公布号	AU2003279460(A1)	申请公布日期	2004.06.03
申请号	AU20030279460	申请日期	2003.11.07
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	HABIB HICHRI;THEORDORUS STANDAERT;GLENN BIERY;JOHN FITZSIMMONS;STEPHEN GRECO;JIA LEE;STEPHEN GATES;TERRY SPOONER;MATTHEW ANGYAL
分类号	H01L21/768;H01L23/532;(IPC1-7):H01L21/768	主分类号	H01L21/768
代理机构		代理人
主权项
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