发明名称 SEMICONDUCTOR STORAGE DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor storage device having an internal interconnection layout, capable of effectively utilizing an array area. <P>SOLUTION: A second metal interconnection (DMTS) is disposed in a dummy word line mapping region (DWLR), and a connection between a low-resistive metal interconnection (MTS), which constitutes a word line (WL) disposed in a normal word line mapping region (NWLRA) and a gate electrode interconnection (TG) of a lower layer is shifted. A memory cell gate electrode interconnection is disposed in a bit line intersection region (TWSA), and gates for an access transistor of a memory cell are interconnected to each other, to form an intersection structure of a bit line, by using metal interconnections (MTFB, MTSB) of the upper layer. <P>COPYRIGHT: (C)2004,JPO
申请公布号 JP2004158802(A) 申请公布日期 2004.06.03
申请号 JP20020325465 申请日期 2002.11.08
申请人 RENESAS TECHNOLOGY CORP 发明人 YANO KENJI;AMANO TERUHIKO
分类号 H01L27/108;G11C5/06;G11C7/14;G11C7/18;G11C8/14;G11C11/401;G11C11/4097;G11C11/4099;H01L21/768;H01L21/8242;H01L27/02 主分类号 H01L27/108
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