MANUFACTURING METHOD FOR OPTICAL SYSTEM, PROJECTION OPTICAL SYSTEM, ALIGNER AND ALIGNING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method for an optical system by which excellent optical performance is secured without substantially influenced by intrinsic birefringence and stress birefringence even in the case of using crystal material such as fluorite. SOLUTION: The optical system is equipped with a crystal transmitting member formed of a crystal material having intrinsic birefringence. The optical system is manufactured through a stage including a distribution measuring step (S1) for measuring the stress birefringence distribution of the crystal transmitting member, and an optimizing step (S5) for optimizing the crystal axis to be aligned with an optical axis of the crystal transmitting member and a rotational angle position around the optical axis of the prescribed crystal axis in the crystal transmitting member by taking optical states obtained for at least two different polarization components based on the stress birefringence distribution as indexes. COPYRIGHT: (C)2004,JPO