| 摘要 |
PROBLEM TO BE SOLVED: To provide a calibration method for a semiconductor tester capable of reducing costs, simplifying working contents, and shortening working hours. SOLUTION: M groups are divided so that at least two of a plurality of drivers and a plurality of comparators are included; the phase of a clock signal and that of a strobe signal are adjusted for each group; the relative phase difference between the clock signals or the strobe signals is acquired for a different group; and the phase of the clock signal and that of the strobe signal included in each group are adjusted, based on the phase difference. COPYRIGHT: (C)2004,JPO
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