| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring instrument for acquiring uniform light quantity over the whole surface of an inspected object. SOLUTION: This shape measuring instrument is equipped with a lighting optical system for irradiating light from a light source to the inspected object, an objective lens for focusing the light radiated from the light source on the inspected object, an imaging lens for forming an image of the inspected object, and a focusing position changing means for relatively moving the focusing position of the objective lens in the optical axis direction. The diameter of a pupil 41S of the objective lens and that of a pupil 12S of the optical system, being on the pupil 41S of the objective lens, are made larger than the diameter of a pupil 17S of the imaging lens. COPYRIGHT: (C)2004,JPO
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