发明名称 |
Device for fixing thin and flexible substrates |
摘要 |
A device or chuck for fixing thin and/or flexible substrates allows a uniform and all-over sucking-up of the substrates without any disadvantageous warping or bending. The chuck has notches and holes communicating with a plurality of microgrooves arranged on the bearing surface. If a vacuum device sucks off air through the bores and the notches, a vacuum extends in the microgrooves so that a substrate located on the bearing surface is sucked up.
|
申请公布号 |
US2004104326(A1) |
申请公布日期 |
2004.06.03 |
申请号 |
US20030631330 |
申请日期 |
2003.07.31 |
申请人 |
DEMEL WALTER;ZOBERBIER RALPH |
发明人 |
DEMEL WALTER;ZOBERBIER RALPH |
分类号 |
G03F7/20;B23Q3/08;H01L21/027;H01L21/683;(IPC1-7):A45D42/14 |
主分类号 |
G03F7/20 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|