| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a diamond polishing method which enables polishing of diamond to a mirror finish under a non-contact state without substantially affected by the state of a substrate, such as its material, warping amount, area, or thickness. <P>SOLUTION: This polishing method comprises dropping a liquid coating agent containing a material different from diamond on the surface of a diamond, hardening the coating agent to form a coating film having a spherical surface on the diamond, and removing, by dry etching, the coating film and the unevenness on the surface of the diamond under such conditions that both the coating film and the diamond can be etched, thus forming a spherical diamond surface. <P>COPYRIGHT: (C)2004,JPO |
