| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To realize a thin-film laminated body that is provided with a conductive layer and wherein an oxide layer with appropriate crystallinity, piezoelectricity and electrostriction is formed, and also to realize an electronic device and an actuator that have high performance and are manufactured at a low cost. <P>SOLUTION: An intermediate layer 12, a lower conductive layer 13, an oxide layer 14, and an upper conductive layer 15 are stacked in sequence on a single crystal substrate 11 made of silicon or GaAs. The intermediate layer 12 made of magnesia spinel (MgAl<SB>2</SB>O<SB>4</SB>), the lowr conductive layer 13 made of elements of a platinum group or their alloy, and the oxide layer 14 with crystal structure having a simple perovskite lattice are formed through epitaxial growth. <P>COPYRIGHT: (C)2004,JPO</p> |
