| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser drilling apparatus capable of drilling a small diameter hole by reducing a spot diameter on a workpiece by the pointing fluctuation of a laser beam. <P>SOLUTION: In the laser drilling apparatus, a mask having an opening part is irradiated with a laser beam from a laser oscillator, the laser beam penetrated through the mask is scanned by a galvanometer and imaged on the workpiece by an fθlens, and the drilling is performed. An optical system for increasing and decreasing the diameter of the laser beam is arranged by a collimator between the mask and fθlens, thereby even when the same size of opening part on the mask is used, the drilling of the small diameter hole can be performed by decreasing the spot diameter on the workpiece without increasing the distance of the optical system to increase the image magnification. <P>COPYRIGHT: (C)2004,JPO</p> |
