| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and system capable of easily forming piezoelectric material films having good piezoelectric characteristics and dielectric characteristics by using a JPS (Jet Printing System). <P>SOLUTION: The deposition system has an aerosol forming vessel 10 in which powder of deposition raw materials is arranged and an aerosol of the deposition raw material is formed, an aerosol forming vessel 20 in which powder of a sintering additive for assisting sintering of the powder of the deposition raw materials is arranged and an aerosol of the sintering additive is formed, a conveyance tube 25 which allows passage of the aerosol of the deposition raw materials and the aerosol of the sintering additive and mixes both, and a nozzle 33 which sprays the aerosols mixed in the conveyance tube to a substrate. <P>COPYRIGHT: (C)2004,JPO</p> |
